VAMAS interlaboratory study on organic depth profiling. Part I: Preliminary report

A. G. Shard, R. Foster, I. S. Gilmore, J. L.S. Lee, S. Ray, L. Yang

Research output: Contribution to journalArticle

Abstract

We present preliminary results of a VAMAS interlaboratory study on organic depth profiling, TWA2, sub-project A3 (d). A layered organic system was used to assess the repeatability and comparability of organic depth profiling. Nineteen respondents have provided sufficient data to demonstrate that the coefficients of variation for depth resolution, sputtering yield and relative secondary ion intensities are typically 5-10%. This can be as good as 2-3% with modern instruments, when using a stable sputtering ion current and careful procedures, which approaches the limits set by the samples themselves. The respondents have also demonstrated three methods to improve the quality of depth profiling for this system, namely, sample rotation, cooling to at least - 80 °C and grazing incidence angles for the sputtering ion.

Original languageEnglish
Pages (from-to)510-513
Number of pages4
JournalSurface and Interface Analysis
Volume43
Issue number1-2
DOIs
Publication statusPublished - 1 Jan 2011

Keywords

  • cluster ions
  • depth profiling
  • secondary ion mass spectroscopy
  • SIMS
  • X-ray photoelectron spectroscopy
  • XPS

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