Design, development and characterization of MEMS silicon diaphragm force sensor

Keyphrases

• Force Sensor 100%
• Silicon Diaphragm 100%
• Repeatability 33%
• High Sensitivity 33%
• Finite Element Analysis 33%
• Stress-strain 33%
• Applied Force 33%
• Sensing Element 33%
• Stress Deflection 33%
• Mechanical Design 33%
• Diaphragm 33%
• Relative Error 33%
• Experimental Characterization 33%
• Mechanical Characteristics 33%
• Computational Investigation 33%
• Metrological 33%
• Diaphragm Based 33%
• Wheatstone Bridge Circuit 33%
• Electrical Quantities 33%
• Piezoresistor 33%
• CAD Tools 33%
• Applied Load 33%
• Permissible Limit 33%
• Approximate Evaluation 33%
• Working Range 33%
• Multicrystalline Silicon 33%
• Mechanical Sensing 33%

Engineering

• Design Development 100%
• Microelectromechanical System 100%
• Diaphragm 100%
• Repeatability 25%
• Applied Force 25%
• Mechanical Design 25%
• Relative Error 25%
• Sensing Element 25%
• Electrical Quantity 25%
• Applied Load 25%
• Silicon Single Crystal 25%
• Experimental Characterization 25%
• Range Force 25%
• Piezoresistor 25%
• Wheatstone Bridge 25%
• Finite Element Analysis 25%
• Computer Aided Design 25%